vue - 13.56 MHz RF Plasma Chamber
This is an RF Plasma chamber using either Nitrogen or Oxygen. The RF Antenna produces a high EM field which produces IONs from the gas and in turn a plasma. Nitrogen is reddish in color and Oxygen blue. This chamber is at a moderate vacuum of only 2 x 10^-2 Torr so a conventional rotary pump is all that was needed. The plate below the antenna will hold samples for ion implantation to modify the surface properties of the sample material.
Commentaires
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คนไทยนิ่
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Thumbs up :)
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Hi guys
I am experimenting PE-CVD using oxygen gas, but I have a problem, now. Last time I saw the same color during plasma process with you but now I can not see it anymore. And my product is failed. Could you please tell me what is the reason for this problem? (condition: RF 200 W, Oxygen 30 sccm, time 5 mins).
And what is the best choice in 2 following cases
- (1) using high RF with a short time of plasma process
- (2) using low RF with a long time of plasma process -
the risk see here is no RF shielding.
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thanks for posting. what the risks about using Oxigen plasma?
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Why is 13.56 Mhz always used as the frequency ? I have read many papers about hydrogen plasma treatment of surfaces and they always seem to used this number.
How exactly does the gas get ionized ? and how does it flow towards the surface. -
How many watts of RF power is going into the chamber?
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ตอนนี้ไม่ทราบว่ามีการพัฒนาต่อรึป่าวครับ แล้วมีทดลองใช้ Gas Ar+O2 รึป่าวครับ
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Have a look, it might be interesting for you.
This is not typical crowd funding,
This is open source project.
https://www.kickstarter.com/projects/384716696/zero-emission-heater -
I have used this kind of thing for plasma etching, it was making the inside surface of capacitor potting boxes rough so that the epoxy would bond well., we used oxygen and the potting boxes.
The machine looked like a washing machine with an antenna rod in the center. -
what do you use, to inject the gas into the chamber?
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You got to make it just compressed heat so you fly to space.
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Okay I got your point everything should be flying around plasma.
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The experiment is clear and interesting, this effect has been observed around a radar antenna or a slayer exciter, both devices working with high frequency induced electromagnetic waves. I was looking with interest the frequency of "enlighting", i used to think that the numbers for nitrogen and oxygen should be different, from your work it looks like 13.56 it's the same in both case, could you give me more information about? what is exactly the impedence matching box?
thank you for sharing your hard work! -
Do you have any drawing for plasma chamber?
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The nitrogen plasma is not violet because of the frequency?
How exactly the color is affected by frequency? -
พี่ครับ ถามหน่อยได้ไหมคัรบ ไอ้เครื่องพวกนี้เขาไว้ใช้เคลือบหรือcoating แบบ DLC ได้ใช่ไหมครับผม รบกวนขอความรู้นิดนึงครับผม
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Aleksandr, definitely it is.
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It looks like a capacitive discharge
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